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MWS_DPP17-2017-001176.pdf
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🔗 Source: absimage.aps.org
📊 Size: 13 KB
📄 Pages: 1 page
⬇️ Downloads: 43

Summary

Diamond-like carbon (DLC) thin film has excellent functions such as high hardness and biocompatibility, and is applied in various fields. However, removal methods like oxygen plasma etching and shot-blast have problems like residual carbon, high cost, and substrate damage. A new removal method using low temperature atmospheric-pressure plasma jet has been developed, which successfully removed DLC from polymeric materials without significant thermal damage.

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Description

Diamond-like carbon (DLC) thin film has excellent functions such as high hardness and biocompatibility, and is applied in various fields.

Technical Information

  • File Format: PDF
  • File Size: 13 KB
  • Pages: 1
  • Language: EN
  • Total Downloads: 43
  • Last Updated: 2 months ago

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