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20 Cfr 656.17

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Preview of [2001] Effect of O2(CO2)/C4F8O gas combinations on global warming gas emission in silicon nitride PECVD plasma cleaningSurface a
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[2001] Effect of O2(CO2)/C4F8O gas combinations on global warming gas emission in silicon nitride PECVD plasma cleaningSurface a (2001-09.pdf)

206 KBEN 6 pages
The study investigates the effects of O2/C4F8 and CO2/C4F8 gas combinations on global warming gas emission in silicon nitride plasma-enhanced chemical vapor...
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combinations global warming emission silicon nitride plasma c4f8o pecvd cleaningsurface study investigates effects enhanced chemical vapor

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