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Advanced Optical Materials Impact Factor

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Photomask Technology: EUV Lithography and Polychromatic Effects (BACUS-Newsletter-July-2022.pdf)

4.17 MBEN 13 pages
Photomask advancements and their impact on extreme ultraviolet lithography, as discussed in SPIE's BACUS group's July 2022 issue, explore simulation of polychromatic effects in high NA EUV lithography for improved exposure systems
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