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Preview of Feedback-Linearized Inverse Feedforward for Creep and Vibration Compensation in AFM Piezoactuators
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Feedback-Linearized Inverse Feedforward for Creep and Vibration Compensation in AFM Piezoactuators (LeangKK_2007.pdf)

965 KBEN 9 pages
The article presents a feedback and feedforward controller design to mitigate creep, hysteresis, and vibration in an AFM piezoactuator system, linearizing nonlinear dynamics and inverting for precise control.
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