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Photoresist

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3 documents available in our comprehensive collection of Photoresist resources. Find practical guides, tutorials, and documentation to enhance your knowledge.

Preview of [2000] Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmasJournal of Vacuum Science and Technology A: Vacuu
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[2000] Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmasJournal of Vacuum Science and Technology A: Vacuu (2000-09.pdf)

387 KBEN 6 pages
Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas was studied.
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Programmed Resist Sidewall Profiles for Si-Photonics Using Sub-Resolution Binary Grayscale Masks (BACUS-Newsletter-June-2012.pdf)

4.72 MBEN 15 pages
This paper describes the creation of a 45-degree mirror for optical applications using grayscale lithography and CMOS manufacturing processes, enabling precise sidewall profiles in Si photonics.
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Preview of SparkFun Inventor's Kit v4.1.2 - Guide
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SparkFun Inventor's Kit v4.1.2 - Guide (SIK v4.1a Book 2020 Web.pdf)

31.87 MBEN 112 pages
The SparkFun Inventor's Kit (SIK) guide is for the SparkFun RedBoard, a microcontroller development platform.
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