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Preview of [2008] Plasma-Enhanced Chemical Vapor Deposition of SiO2 Thin Films at Atmospheric Pressure by Using HMDS/Ar/O2 Journal of the K
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[2008] Plasma-Enhanced Chemical Vapor Deposition of SiO2 Thin Films at Atmospheric Pressure by Using HMDS/Ar/O2 Journal of the K (2008-15.pdf)

716 KBEN 5 pages
SiO2-like thin films were deposited at low temperature (
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Preview of [2001] Effect of O2(CO2)/C4F8O gas combinations on global warming gas emission in silicon nitride PECVD plasma cleaningSurface a
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[2001] Effect of O2(CO2)/C4F8O gas combinations on global warming gas emission in silicon nitride PECVD plasma cleaningSurface a (2001-09.pdf)

206 KBEN 6 pages
The study investigates the effects of O2/C4F8 and CO2/C4F8 gas combinations on global warming gas emission in silicon nitride plasma-enhanced chemical vapor...
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