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Summary

Aera Transformer digital mass flow controllers (MFCs) and mass flow meters (MFMs) offer superior flexibility, lower cost of ownership, and outstanding accuracy, repeatability, and stability. They feature comprehensive communication and control, easy integration, substantial cost savings, and world-class service and support. The MFCs have advanced sensor and valve technology, field-proven platform components, and high-speed digital circuitry, delivering precise gas flow control. They are suitable for various applications, including CVD, PVD, diffusion, and etch, and can replace hundreds of spares and part numbers with just eight multi-gas, multi-range units.

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Description

Aera Transformer digital mass flow controllers (MFCs) and mass flow meters (MFMs) offer superior flexibility, lower cost of ownership, and outstanding...

Technical Information

  • File Format: PDF
  • File Size: 1.25 MB
  • Pages: 8
  • Language: EN
  • Total Downloads: 42
  • Last Updated: 1 month ago

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