Grapho-Epitaxy DSA.pdf

BACUS-Newsletter-August-2014.pdf
Preview of Grapho-Epitaxy DSA
🔗 Source: spie.org
📊 Size: 660 KB
📄 Pages: 11 pages
⬇️ Downloads: 55

Summary

Contact Hole Multiplication using Grapho-Epitaxy Directed Self-Assembly is a templated DSA flow that creates sub-resolution hole patterns using Block Co-Polymer materials, with research focusing on process choices, template optimization, and placement accuracy.

Description

Contact Hole Multiplication using Grapho-Epitaxy Directed Self-Assembly is a templated DSA flow that creates sub-resolution hole patterns using Block...

Technical Information

  • File Format: PDF
  • File Size: 660 KB
  • Pages: 11
  • Language: EN
  • Total Downloads: 55
  • Last Updated: 1 week ago

Document Overview

This PDF document about Grapho-Epitaxy DSA provides comprehensive information and guidance. Whether you're a beginner or advanced user, this resource offers valuable insights into Grapho-Epitaxy DSA.

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