Mask Write Time Improvement.pdf
BACUS-Newsletter-April-2011.pdf
Description
Researchers improved mask write time for curvilinear assist features at 22nm using model-based mask data preparation, reducing e-beam write times by nearly a...
Technical Information
- File Format: PDF
- File Size: 2.77 MB
- Pages: 11
- Language: EN
- Total Downloads: 24
- Last Updated: 3 weeks ago
Document Overview
This PDF document about Mask Write Time Improvement provides comprehensive information and guidance. Whether you're a beginner or advanced user, this resource offers valuable insights into Mask Write Time Improvement.
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