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Feedback-Linearized Inverse Feedforward For Creep And Vibration Compensation In AFM Piezoactuators.pdf

LeangKK_2007.pdf
Preview of Feedback-Linearized Inverse Feedforward for Creep and Vibration Compensation in AFM Piezoactuators
🔗 Source: kam.k.leang.com
📊 Size: 965 KB
📄 Pages: 9 pages
⬇️ Downloads: 27

Summary

This brief presents a novel approach to compensate for creep, hysteresis, and vibration effects in an experimental piezoactuator system used in atomic force microscopy (AFM). The method combines feedback and feedforward control techniques:

1. Feedback Linearization: High-gain feedback control is used to linearize the nonlinear dynamics of the piezoactuator, accounting for hysteresis and creep.
2. Feedforward Inversion: The linear vibrational dynamics are modeled, and an inversion process finds a feedforward input to correct for vibration effects. This decoupled approach simplifies the modeling and control design compared to considering all three effects simultaneously.

The integrated feedback-linearized system with augmented feedforward input achieves high-precision, high-speed positioning. The method was successfully demonstrated on a piezoscanner in an AFM, resulting in significant reductions in both maximum and root-mean-square tracking errors:

- High-gain feedback control reduces the maximum error by over 90% compared to uncompensated cases.
- At relatively high scan rates, the integrated system improves performance by over 75% (i.e., reduces maximum error) when the inversion-based feedforward input is included.

This work addresses critical challenges in piezo-positioning systems for applications like quantum dot cellular automata and highlights the benefits of the proposed approach in improving positioning accuracy and bandwidth.

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Description

The article presents a feedback and feedforward controller design to mitigate creep, hysteresis, and vibration in an AFM piezoactuator system, linearizing nonlinear dynamics and inverting for precise control.

Technical Information

  • File Format: PDF
  • File Size: 965 KB
  • Pages: 9
  • Language: EN
  • Total Downloads: 27
  • Last Updated: 5 hours ago

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This PDF document about Feedback-Linearized Inverse Feedforward for Creep and Vibration Compensation in AFM Piezoactuators provides comprehensive information and guidance. Whether you're a beginner or advanced user, this resource offers valuable insights into Feedback-Linearized Inverse Feedforward for Creep and Vibration Compensation in AFM Piezoactuators.

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If you're interested in Feedback-Linearized Inverse Feedforward for Creep and Vibration Compensation in AFM Piezoactuators, you might also want to explore:

Feedback-Linearized guideFeedback-Linearized tutorialInverse guideInverse tutorialFeedforward guideFeedforward tutorialCreep guideCreep tutorialVibration guideVibration tutorialCompensation guideCompensation tutorialPiezoactuators guidePiezoactuators tutorial

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