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epjconf_eosam2022_10009.pdf
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🔗 Source: epj-conferences.org
📊 Size: 1.63 MB
👤 Author: Krüger Jan, Bergmann Detlef, Sturm Matthias, Häßler-Grohne Wolfgang, Köning Rainer, Bodermann Bernd
⬇️ Downloads: 94

Summary

Researchers at PTB developed a custom microscope setup adjusted using an alignment autocollimator (AAC), achieving residual centring and angular misalignments below 500 µm and 1 mrad. The microscope's adjustment quality was assessed by measuring a 200 nm chrome dot structure, with the goal of evaluating optical aberrations. The AAC-based alignment strategy and dot measurements were used to verify the microscope's operational status, with the effect of residual aberrations being minimal.

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Description

Researchers at PTB developed a custom microscope setup adjusted using an alignment autocollimator (AAC), achieving residual centring and angular misalignments...

Technical Information

  • File Format: PDF
  • File Size: 1.63 MB
  • Pages: 2
  • Language: EN
  • Author: Krüger Jan, Bergmann Detlef, Sturm Matthias, Häßler-Grohne Wolfgang, Köning Rainer, Bodermann Bernd
  • Total Downloads: 94
  • Last Updated: 1 week ago

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