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Si3n4

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3 documents available in our comprehensive collection of Si3n4 resources. Find practical guides, tutorials, and documentation to enhance your knowledge.

Preview of [2023] Selective isotropic etching of SiO2 over Si3N4 using NF3/H2 remote plasma and methanol vaporScientific Reports 13 (1), 11
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[2023] Selective isotropic etching of SiO2 over Si3N4 using NF3/H2 remote plasma and methanol vaporScientific Reports 13 (1), 11 (2023-8.pdf)

6.85 MBHong Seong GilEN 12 pages
Researchers investigated an isotropic etching process for SiO2 selective to Si3N4 using NF3/H2/methanol chemistry
Preview of TES Bolometer
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TES Bolometer (PosterSiri_NeuTel.pdf)

1.24 MBBeatrice SiriEN 1 page
Researchers developed a large area superconducting TES spider-web bolometer for CMB polarization measurements for the LSPE balloon-borne telescope, with a...
Preview of -> Publisher:Paper
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-> Publisher:Paper (RPC2012_066.pdf)

443 KBEN 8 pages
Ceramic Resistive Plate Chambers (RPCs) are being developed for the Compressed Baryonic Matter (CBM) experiment's Time-of-Flight wall, which requires a time...

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