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[2005] Characteristics Of Inductively Coupled Plasma With Multiple U-type Internal Antenna For Flat Panel Display ApplicationsSu.pdf

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Preview of [2005] Characteristics of inductively coupled plasma with multiple U-type internal antenna for flat panel display applicationsSu
🔗 Source: swb.skku.edu
📊 Size: 215 KB
📄 Pages: 4 pages
⬇️ Downloads: 50

Summary

Researchers investigated the characteristics of a large-area internal linear inductively coupled plasma (ICP) source using two types of antennas: a conventional serpentine-type antenna and a newly developed multiple U-type antenna. The multiple U-type antenna showed higher plasma density, higher radical density, and more plasma stability compared to the serpentine-type antenna. Using the multiple U-type antenna, a plasma density of 2×10^11/cm^3 with a plasma uniformity of 4% was achieved using 15 mTorr Ar and 5000 W of RF power. The results suggest that the multiple U-type antenna is a promising solution for large-area plasma processing, particularly for flat panel display applications.

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Description

Researchers investigated the characteristics of a large-area internal linear inductively coupled plasma (ICP) source using two types of antennas: a...

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  • File Format: PDF
  • File Size: 215 KB
  • Pages: 4
  • Language: EN
  • Total Downloads: 50
  • Last Updated: 1 month ago

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