Mitigating Chrome Degradation In High-Volume ArF Layers: OPC Model Comparison.pdf
BACUS-Newsletter-February-2014.pdfDescription
Presents an alternative material solution to prevent chrome degradation on high-volume ArF layers, ensuring consistent performance in optical proximity correction (OPC) models across different mask blanks.
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- File Format: PDF
- File Size: 394 KB
- Pages: 10
- Language: EN
- Total Downloads: 13
- Last Updated: 1 week ago
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