Peer Review File.pdf

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A study on substantial lifetime enhancement of Si-based photoanodes enabled by amorphous TiO2 coating with improved stoichiometry is presented. Reviewer #1 suggests the work can be considered for publication after addressing several comments, including the unclear relationship between pin-hole formation in TiO2 and decreased PEC performance, and the unexpected stability despite corrosion.

Reviewer #2 does not recommend publication, considering the engineering goal of removing residual ligand during ALD growth basic and the solution specific to the TiCl4 precursor. The reviewer suggests discussing why TiCl4 and water are preferred precursors and exploring the effect of leftover ligands from other precursors on film stability.

The authors respond to the comments, explaining the relationship between pin-hole formation and decreased PEC performance, and the stability despite corrosion. They also discuss the preferred precursors and the potential impact of leftover ligands from other precursors on film stability.